Standards – always a step ahead
E-mail: info@bds-bg.org
1797 Sofia, 13 "Lachezar Stanchev" Str., "Izgrev" Complex
ID number: 175079183, VAT number: BG175079183
БДС EN ISO 23131:2023
Ellipsometry - Principles (ISO 23131:2021)
General information
60.60 Mar 16, 2023
BDS
European Standard
English
The standard is being translated and is in the "Standardization editing" state view more ...
Appropriate for SMEs
Buying
Published
Scope
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Life cycle
NOW
PUBLISHED
БДС EN ISO 23131:2023
60.60
Standard published
Mar 16, 2023